多晶硅生產中還有大量的廢氣進行排放，其中不僅含有氯硅烷，還有大量的氫氣和氯化氫氣體，還原反應系統及多晶硅尾氣回收系統排放的富含非金屬雜質的氫氣、精餾裝置排放的尾氣基本上未進行回收利用，大量的氫氣和氯化氫氣體不能得到良好的回收，回收不徹底。一般采用堿液淋洗吸收后排放放空，環保問題較為突出，氯硅烷、氫氣和氯化氫損耗較大。

　　浩瀚色譜研發HH-1毛細管柱測定多晶硅尾氣中氯化氫，柱效高，分離好，結果滿意。

　　名稱:毛細管柱

　　固定液:二甲基聚硅氧烷

　　規格:30m*0.53mm*1.5um

　　型號:HH-1

　　應用:T/CNIA 0016-2019多晶硅用回收氫氣中氯化氫,氮氣,氧氣,總碳含量的氣相色譜測定

　　適用于:安捷倫6890 ，7890,7820,8860,8890；島津GC2014，GC-2010，GC-2030；賽默飛1310，瓦里安，布魯克，PE，磐諾，天瑞，天美

　　In the production of polycrystalline silicon, there is still a large amount of exhaust gas emitted, which not only contains chlorosilane, but also a large amount of hydrogen and hydrogen chloride gases. The hydrogen gas rich in non-metallic impurities emitted from the reduction reaction system and polycrystalline silicon tail gas recovery system, as well as the tail gas emitted from the distillation unit, are basically not recycled and reused. A large amount of hydrogen and hydrogen chloride gases cannot be well recovered, and the recovery is not thorough. Generally, alkaline solution is used for washing and absorption before discharging and emptying, which poses a prominent environmental issue. Chlorosilane, hydrogen gas, and hydrogen chloride suffer from significant losses.

　　Haohan Chromatography developed HH-1 capillary column for the determination of hydrogen chloride in polycrystalline silicon exhaust gas, with high column efficiency, good separation, and satisfactory results.

　　Name: Capillary Column

　　Fixed Liquid: Dimethyl Polysiloxane

　　Specification: 30m * 0.53mm * 1.5um

　　Model: HH-1

　　Application: Gas Chromatography Determination of Hydrogen Chloride, Nitrogen, Oxygen, and Total Carbon Content in Recycled Hydrogen for Polycrystalline Silicon (T/CNIA 0016-2019)

　　Applicable to: Agilent 68907890782088608890; Shimadzu GC2014, GC-2010，GC-2030； Thermo Fisher 1310, Varian, Brooke, PE, Panno, Tianrui, Tianmei